ASTM F1844-1997(2008) 用非接触式涡流计测量平板显示器制造用薄膜导体耐力的标准实施规程
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【英文标准名称】:StandardPracticeforMeasuringSheetResistanceofThinFilmConductorsForFlatPanelDisplayManufacturingUsingaNoncontactEddyCurrentGage
【原文标准名称】:用非接触式涡流计测量平板显示器制造用薄膜导体耐力的标准实施规程
【标准号】:ASTMF1844-1997(2008)
【标准状态】:现行
【国别】:美国
【发布日期】:1997
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.17
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:
【英文主题词】:conductance;electricalconductance;electricalresistance;electricalsheetconductance;electricalsheetresistance;flatpaneldisplays;noncontacteddycurrent;resistance;sputteredthinfilms;thinconductivefilmsonglass;thinfilm;Electricalco
【摘要】:Resistivityisaprimaryquantityforcharacterizationandspecificationofcoatedglassplatesusedforflatpaneldisplays.Sheetresistanceisalsoaprimaryquantityforcharacterization,specification,andmonitoringofthinfilmfabricationprocesses.Thispracticerequiresnospecimenpreparation.Theeddycurrentmethodisnon-destructivetothethinfilmbeingmeasured.Specialgeometricalcorrectionfactors,neededforsomefour-pointprobeelectricalresistivitymeasurements,arenotrequiredtoderivethetruesheetresistancesolongasthetransducershaveacontinuouslayerofconductivethinfilmbetweenthem.TestMethodsF673referstoatestingarrangementinwhichthetransducersandspecimen(asemiconductorgradesiliconwafer)arerigidlypositioned.Similarapparatusiscommerciallyavailablefortestinglargeglassorplasticsubstrates,notenvisionedinthescopeofTestMethodsF673.Ahandheldprobecanalsobeused,dependingonthroatdepthrequired.Foruseasarefereemethod,theprobeandmeasuringapparatusmustfirstbecheckedandqualifiedbeforeusebytheproceduresofTestMethodsF673(9.1.1through9.1.3and9.1.4.2through9.1.4.5),thenthispracticeisused.Foruseasaroutinequalityassurancemethod,thispracticemaybeemployedwithperiodicqualificationsofprobeandmeasuringapparatusbytheproceduresofTestMethodsF673(9.1.1through9.1.3and9.1.4.2through9.1.4.5).Thepartiestothetestmustagreeuponadequatequalificationintervalsforthetestapparatus.1.1Thispracticedescribesmethodsformeasuringthesheetelectricalresistanceofsputteredthinconductivefilmsdepositedonlargeinsulatingsubstrates(glassorplastic),usedinmakingflatpanelinformationdisplays.1.2ThispracticeisintendedtobeusedwithTestMethodsF673.Thispracticepertainstoax201C;manualx201D;measurementprocedureinwhichanoperatorpositionsthemeasuringheadonthetestspecimenandthenpersonallyactivatesthetestapparatus.Theresultingtestdatamaybetabulatedbytheoperator,or,alternatively,senttoacomputer-baseddataloggingsystem.BothMethodsIandIIofTestMethodsF673(paragraphs3.1through3.3.3ofTestMethodsF673)areapplicabletothispractice.1.3Sheetresistivityintherange0.020to3000x2126;persquare(sheetconductanceintherange3by10x2013;4to50mhospersquare)maybemeasuredbythispractice.Thesheetresistanceisassumedtobeuniformintheareabeingprobed.Note18212;Typicalmanualtestunits,asdescribedinthispractice,measureandreportintheunitsx201C;mhospersquarex201D;;thisistheinverseofx201C;ohmspersquare.x201D;1.4Thispracticeisapplicabletoflatsurfacesonly.1.5Thispracticeisnon-destructive.Itmaybeusedonproductionpanelstohelpassureproductionuniformity.1.6ThevaluesstatedinSIunitsaretoberegardedasstandard.Nootherunitsofmeasurementareincludedinthisstandard.1.7Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:L90
【国际标准分类号】:31_120
【页数】:5P.;A4
【正文语种】:英语
【原文标准名称】:用非接触式涡流计测量平板显示器制造用薄膜导体耐力的标准实施规程
【标准号】:ASTMF1844-1997(2008)
【标准状态】:现行
【国别】:美国
【发布日期】:1997
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.17
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:
【英文主题词】:conductance;electricalconductance;electricalresistance;electricalsheetconductance;electricalsheetresistance;flatpaneldisplays;noncontacteddycurrent;resistance;sputteredthinfilms;thinconductivefilmsonglass;thinfilm;Electricalco
【摘要】:Resistivityisaprimaryquantityforcharacterizationandspecificationofcoatedglassplatesusedforflatpaneldisplays.Sheetresistanceisalsoaprimaryquantityforcharacterization,specification,andmonitoringofthinfilmfabricationprocesses.Thispracticerequiresnospecimenpreparation.Theeddycurrentmethodisnon-destructivetothethinfilmbeingmeasured.Specialgeometricalcorrectionfactors,neededforsomefour-pointprobeelectricalresistivitymeasurements,arenotrequiredtoderivethetruesheetresistancesolongasthetransducershaveacontinuouslayerofconductivethinfilmbetweenthem.TestMethodsF673referstoatestingarrangementinwhichthetransducersandspecimen(asemiconductorgradesiliconwafer)arerigidlypositioned.Similarapparatusiscommerciallyavailablefortestinglargeglassorplasticsubstrates,notenvisionedinthescopeofTestMethodsF673.Ahandheldprobecanalsobeused,dependingonthroatdepthrequired.Foruseasarefereemethod,theprobeandmeasuringapparatusmustfirstbecheckedandqualifiedbeforeusebytheproceduresofTestMethodsF673(9.1.1through9.1.3and9.1.4.2through9.1.4.5),thenthispracticeisused.Foruseasaroutinequalityassurancemethod,thispracticemaybeemployedwithperiodicqualificationsofprobeandmeasuringapparatusbytheproceduresofTestMethodsF673(9.1.1through9.1.3and9.1.4.2through9.1.4.5).Thepartiestothetestmustagreeuponadequatequalificationintervalsforthetestapparatus.1.1Thispracticedescribesmethodsformeasuringthesheetelectricalresistanceofsputteredthinconductivefilmsdepositedonlargeinsulatingsubstrates(glassorplastic),usedinmakingflatpanelinformationdisplays.1.2ThispracticeisintendedtobeusedwithTestMethodsF673.Thispracticepertainstoax201C;manualx201D;measurementprocedureinwhichanoperatorpositionsthemeasuringheadonthetestspecimenandthenpersonallyactivatesthetestapparatus.Theresultingtestdatamaybetabulatedbytheoperator,or,alternatively,senttoacomputer-baseddataloggingsystem.BothMethodsIandIIofTestMethodsF673(paragraphs3.1through3.3.3ofTestMethodsF673)areapplicabletothispractice.1.3Sheetresistivityintherange0.020to3000x2126;persquare(sheetconductanceintherange3by10x2013;4to50mhospersquare)maybemeasuredbythispractice.Thesheetresistanceisassumedtobeuniformintheareabeingprobed.Note18212;Typicalmanualtestunits,asdescribedinthispractice,measureandreportintheunitsx201C;mhospersquarex201D;;thisistheinverseofx201C;ohmspersquare.x201D;1.4Thispracticeisapplicabletoflatsurfacesonly.1.5Thispracticeisnon-destructive.Itmaybeusedonproductionpanelstohelpassureproductionuniformity.1.6ThevaluesstatedinSIunitsaretoberegardedasstandard.Nootherunitsofmeasurementareincludedinthisstandard.1.7Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:L90
【国际标准分类号】:31_120
【页数】:5P.;A4
【正文语种】:英语
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点击此处下载